
Applications
Instrutech vacuum gauges, controllers and modules provide highly reliable solutions in a wide range of vacuum measurement and control applications including:
- Semiconductor – (PVD, CVD, ALD, Implant, Etch, MBE, MOCVD, Metrology, Lithography..)
- Thin Film Deposition – (Glass, Web, Optical, Display Coatings,..)
- Data Storage - (Manufacturing of CDs, DVDs, disk drives…)
- Flat Panel Displays - (LCD chamber pump-down, thin film coatings…)
- Government and Academia – (National Research Labs, Universities, Accelerators, High energy physics, Nanofabrication, Aerospace, Surface and material sciences…)
- Analytical – (Life Sciences, Chemical Analysis, Mass Spectrometry, Chromatography, NMR,..)
- Process Vacuum – (Pharmaceutical, Biotech, Food, Freeze drying,..)
- Industrial – (Vacuum furnaces, Leak detection, General vacuum,…)
InstruTech Vacuum Instrumentation
Utilizing the most recent advances in vacuum gauge sensor
and controller design.
New Ionization Vacuum Gauge with Dual Convection
Introducing the first modular Ionization Vacuum Gauge Capable of operating two Convection gauges.






